Abstract: Data flow analysis is an important part in a compiler and incremental analysis is very useful in the compilers with interprocedure analysis and optimization or in the programming developing environment. When a program is modified a little or is optimized, incremental analysis can maintain the data flow information, which can avoid recomputing the data flow information of the whole procedure because of a little change. Here, an incremental elimination algorithm of data flow analysis is given. The algorithm is based on a non incremental algorithm-Tarjan’s fast path algorithm. It has fairly good complexity and universality （it can be used in irreducible control flow graph and incomplete flow function set）. What’s more, it can maintain data flow information fast and conveniently when a change happens.