The Study of Effects of Sputtering Conditions on the Stress of RF-Sputtered Alumina Films

In this paper, The developmental process of the calculating theory of the stress in thin films on the same substrate is described briefly. And the advantages and disadvantages for every calculating formula are also evaluated. These methods are referred to as "bending beam method". The experimental results of effects of RF-sputtering conditions on the stress of sputtered alumina films are reported in detail.